Turbomolecular pumps, magnetically levitated

• Flexible interface options
• On-board frequency converter and power supply
• Easy, space-saving system integration

Your needs:

• Clean, high and ultra-high vacuum generation
• Suitable for industrial processes such as PVD, display coating, and glass coating
• Impervious to particles or deposits
• Low maintenance requirements

Our solutions:

• Pumping speeds of up to 2,200 l/s
• Suitable for vibration sensitive applications
• High throughput and high compression variants available
• Holweck stage incorporated
• Resistant to particles and deposits
• Tolerance to shock-venting
• Monitoring and self-protection functions
• Maintenance-free in most applications